Toward nano- and microprocessing in glass with femtosecond laser pulses
نویسندگان
چکیده
In this paper, we report on the refractive index changes and vacancies that are induced in silica glass by the irradiation of ultrashort laser pulses. We fabricated waveguides, couplers, and gratings by the filamentation of femtosecond laser pulses. We demonstrate the formation and the movement of sub-micrometer or nanometer vacancies, called voids. We show the formation of three-dimensional shapes of deep holes with microscopic diameters in contact with water at the rear surface of silica glass.
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